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Understanding MEMS : principles and applications / Luis Castañer.

By: Chichester, West Sussex, UK : John Wiley & Sons Ltd, ©2016Description: xiv, 314 pages ; 26 cmContent type:
  • text
ISBN:
  • 9781119055426 (cloth)
Subject(s): Additional physical formats: Online version:: Understanding MEMSDDC classification:
  • 23 621.381/C27
LOC classification:
  • TK7875 .C37 2015
Contents:
Scaling of forces -- Elasticity -- Bending of microstructures -- Piezoresistance and piezoelectricity -- Electrostatic driving and sensing -- Resonators -- Microfluidics and electrokinetics -- Thermal devices -- Fabrication.
Summary: The continued advancement of MEMS (micro-electro-mechanical systems) complexity, performance, commercial exploitation and market size requires an ever-expanding graduate population with state-of-the-art expertise.
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College of Engineering and Computer Studies

This book is accompanied by a companion website : www.wiley.com/go/castaner/understandingmems.The website includes : Matlab, PSpice codes, Chapter viewgraphs.

Includes bibliographical references and index.

Scaling of forces -- Elasticity -- Bending of microstructures -- Piezoresistance and piezoelectricity -- Electrostatic driving and sensing -- Resonators -- Microfluidics and electrokinetics -- Thermal devices -- Fabrication.

The continued advancement of MEMS (micro-electro-mechanical systems) complexity, performance, commercial exploitation and market size requires an ever-expanding graduate population with state-of-the-art expertise.

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