Understanding MEMS :
Castañer, Luis,
Understanding MEMS : principles and applications / Luis Castañer. - xiv, 314 pages ; 26 cm.
This book is accompanied by a companion website : www.wiley.com/go/castaner/understandingmems.The website includes : Matlab, PSpice codes, Chapter viewgraphs.
Includes bibliographical references and index.
Scaling of forces -- Elasticity -- Bending of microstructures -- Piezoresistance and piezoelectricity -- Electrostatic driving and sensing -- Resonators -- Microfluidics and electrokinetics -- Thermal devices -- Fabrication.
The continued advancement of MEMS (micro-electro-mechanical systems) complexity, performance, commercial exploitation and market size requires an ever-expanding graduate population with state-of-the-art expertise.
College of Engineering and Computer Studies
9781119055426 (cloth)
2015024280
Microelectromechanical systems.
TK7875 / .C37 2015
621.381/C27
Understanding MEMS : principles and applications / Luis Castañer. - xiv, 314 pages ; 26 cm.
This book is accompanied by a companion website : www.wiley.com/go/castaner/understandingmems.The website includes : Matlab, PSpice codes, Chapter viewgraphs.
Includes bibliographical references and index.
Scaling of forces -- Elasticity -- Bending of microstructures -- Piezoresistance and piezoelectricity -- Electrostatic driving and sensing -- Resonators -- Microfluidics and electrokinetics -- Thermal devices -- Fabrication.
The continued advancement of MEMS (micro-electro-mechanical systems) complexity, performance, commercial exploitation and market size requires an ever-expanding graduate population with state-of-the-art expertise.
College of Engineering and Computer Studies
9781119055426 (cloth)
2015024280
Microelectromechanical systems.
TK7875 / .C37 2015
621.381/C27
