000			01945cam a22003858i 4500
001			18694930
003			OSt
005			20190707231337.0
007			ta
008			150710s2015 enk b 001 0 eng c
010			_a 2015024280
020			_a9781119055426 (cloth)
040			_aHoly Name University. _beng _cLearning Resource Center _erda
042			_apcc
050	0	0	_aTK7875 _b.C37 2015
082	0	0	_223 _a621.381/C27
521			_aCOECS
085	0	0	_aCOE 621.381/C27 _223
100	1		_aCastañer, Luis, _eauthor. _97787
245	1	0	_aUnderstanding MEMS : _bprinciples and applications / _cLuis Castañer.
263			_a1511
264			_aChichester, West Sussex, UK : _bJohn Wiley & Sons Ltd, _c©2016.
300			_axiv, 314 pages ; _c26 cm.
336			_atext
500			_aThis book is accompanied by a companion website : www.wiley.com/go/castaner/understandingmems.The website includes : Matlab, PSpice codes, Chapter viewgraphs.
504			_aIncludes bibliographical references and index.
505	0		_aScaling of forces -- Elasticity -- Bending of microstructures -- Piezoresistance and piezoelectricity -- Electrostatic driving and sensing -- Resonators -- Microfluidics and electrokinetics -- Thermal devices -- Fabrication.
520			_aThe continued advancement of MEMS (micro-electro-mechanical systems) complexity, performance, commercial exploitation and market size requires an ever-expanding graduate population with state-of-the-art expertise.
650		0	_aMicroelectromechanical systems. _97788
776	0	8	_iOnline version: _aCastañer, Luis, author. _tUnderstanding MEMS _dChichester, UK ; Hoboken, New Jersey : John Wiley & Sons, 2015 _z9781119055433 _w(DLC) 2015027790
906			_a7 _bcbc _corignew _d1 _eecip _f20 _gy-gencatlg
942			_2ddc _cBK
999			_c28107 _d28107