TY  - BOOK
AU  - Castañer,Luis
TI  - Understanding MEMS: principles and applications 
SN  - 9781119055426 (cloth)
AV  - TK7875 .C37 2015
U1  - 621.381/C27 23
PY  - 2016///
CY  - Chichester, West Sussex, UK : 
PB  - John Wiley & Sons Ltd, 
KW  - Microelectromechanical systems
N1  - This book is accompanied by a companion website : www.wiley.com/go/castaner/understandingmems.The website includes : Matlab, PSpice codes, Chapter viewgraphs; Includes bibliographical references and index; Scaling of forces -- Elasticity -- Bending of microstructures -- Piezoresistance and piezoelectricity -- Electrostatic driving and sensing -- Resonators -- Microfluidics and electrokinetics -- Thermal devices -- Fabrication; COECS
N2  - The continued advancement of MEMS (micro-electro-mechanical systems) complexity, performance, commercial exploitation and market size requires an ever-expanding graduate population with state-of-the-art expertise
ER  -