Castaņer, Luis, <br/><br/>
Understanding MEMS :  principles and applications / 
Luis Castaņer. 
 - xiv, 314 pages ;  26 cm. 
<br/><br/> This book is accompanied by a companion website : www.wiley.com/go/castaner/understandingmems.The website includes : Matlab, PSpice codes, Chapter viewgraphs. 
<br/><br/>Includes bibliographical references and index. 
<br/><br/>Scaling of forces -- Elasticity -- Bending of microstructures -- Piezoresistance and piezoelectricity -- Electrostatic driving and sensing -- Resonators -- Microfluidics and electrokinetics -- Thermal devices -- Fabrication. 
<br/><br/> The continued advancement of MEMS (micro-electro-mechanical systems) complexity, performance, commercial exploitation and market size requires an ever-expanding graduate population with state-of-the-art expertise. 
<br/><br/> College of Engineering and Computer Studies 
<br/><br/><label>ISBN: </label>9781119055426 (cloth) 
<br/><br/><label>LCCN: </label>2015024280 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems.
<br/><br/><label>LC Class. No.: </label>TK7875  / .C37 2015 
<br/><br/><label>Dewey Class. No.: </label>621.381/C27