Hsu, Tai- Ran <br/><br/>
MEMS and microsystems: design and manufacture / 
Tai- Ran Hsu 
<br/><br/> College of Engineering and Computer Studies  Bachelor of Science in Electronics Engineering 
<br/><br/><label>ISBN: </label>0072393912 
<br/><br/><label>Dewey Class. No.: </label>621.381 H85